Lumped-Parameter Equivalent Circuit Modeling of CMUT Array Elements

Design and modeling are key steps in the value chain of Capacitive Micromachined Ultrasonic Transducer (CMUT) arrays. Although CMUT array element models very powerful, most them still limited their use as tools for electronic design assistance. The electroacoustic equivalent circuits developed mainly based on a distributed-element approach while lumped-parameter electrical better suited software interoperations. To meet this need, present study aims to implement an scheme full element, two-port network representation made lumped-parameters. After extensive bibliographical review models, new model is set-up from fully distributed using Foldy’s definitions at level. Transmit receive modes implemented scalar equations given by lumped parameters. Moreover, reciprocity analysis, performance complete measurement emission reception will be defined relevant transfer functions. Finally, help one elements application, method computation membranes thickness-size master curves proposed. CMUT-based allowed opens wide range possibilities regarding design, integration, operations with acoustic propagation simulation more.